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Alicona InfiniteFocus optical measurement system using Focus Variation technology
Could you view AND measure this in your SEM?
The SEM is a well established method of providing high quality images with large depth of field with very comprehensive X-ray analysis. What it does not provide however is the ability to measure complex shapes and surface finish that are a requirement in many materials and engineering research and industrial segments.
The image of a micro MeX plate shown above is an example; it is 700 µm x 550 µm x 150 µm high with gaps of less than 40 µm and the requirement is to image and measure form and surface finish. This image is produced on the Alicona InfiniteFocus optical measurement system using the Focus Variation technology, It is built into an easy to use package, no sample preparation is required and no vacuum is required. This makes it ideal for porous-type samples that do not perform well in vacuum.
The operating principle of focus variation moves the small depth of focus of an optical system, combined with modulated light, over the object with continuous vertical scanning, producing a topographic 3D data model of the surface. As the distance between the object and objective is varied the variation of sharpness is used for measuring 3D depth information and a dense 3D point cloud is obtained. This 3D point cloud can be then used to measure features and surface finish and also used for reverse engineering and comparison against CAD data.
Focus Variation will allow the measurement of 'Z' heights from 10 nm up to 22 mm, near vertical walls from 800 with interspacing below 10 µm, and radius down to 2 µm, with complete surface measurement and characterization.
This technique does not replace the SEM and its capabilities, it can generally be considered as complimentary. It maybe is an alternative in cases where only imaging and/or measurement is required.
For more information contact: info@brookanco.com
This Week's Featured Product!
Alicona Infinite Focus XL System
»Large measurement fields
Measure samples as large as1 000mm x 1000mm.
»Heavy samples
Measure heavy samples with weights up to 200kg.
»Form and roughness measurements in one system
Save time and money by using only one measurement system.
InfiniteFocus is an optical 3D measurement device for quality assurance in the micro- and nano range. It provides all functionalities for dimensional measurements, surface analysis and characterization. Geometries with steep flanks, highly reflective properties and strong roughness are measured with a vertical resolution up to 10nm, making the instrument ideal for surface study of both homogeneous and compound materials. 3D Measurements are performed directly in the optical image.
Click for more information.
Featured Article:
FOCUS VARIATION — NEW ADVANCE IN OPTICAL 3D METROLOGY FOR MICRO MACHINING APPLICATIONS.
Click to view article.
Need to transport your NEXIV System to another facility? Nikon service technicians are trained to properly handle and prepare your high precision measurement instrument during the relocation process.
Diagnostics and functionality are performed before and after relocation to ensure system parameters remain within factory specifications.
Our in-plant and off-site relocation service includes:
For more information please call 1-800-388-7566 or email info@brookanco.com
Nikon's new MM-200 Measuring Microscope is compact and lightweight with an affordable price for all who require precision and accuracy for measuring a variety of metal, plastic, and electronic parts in all industries; especially automotive and electronics. This powerful new microscope is especially designed and engineered with the machining engineers and inspectors in mind. Contact us for a quote or demonstration today.
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